QUARTZ TUBE & FURNACE

     • Tube Dimensions: ф100*1200mm

     • Furnace Body (WxHxD): 500x500x350

     • Heater: Kanthal Wire w/ Glass Wool Molding

     • Maximum Temperature: 1,100°C

     • Thermocouple: K type, ID 6.5 mm

     • Heating Zone: 1-zone, ф100*350mm

     • Linear Motion Control Unit

     • Manual Furnace Door

GAS SUPPLY UNIT

     • Three (3) Celerity TN2900 Mass Flow Controllers

          o Hydrogen (H2), 100sccm

          o Methane (CH4), 200sccm

planarGROW-4S with a 3-zone Furnace

          o Argon (Ar): 1,000sccm

 • Open Mounting Bay for Fourth (4th) MFC

     • ¼” Stainless Steel Tubing

     • Five (5) ¼” Pneumatic-Type Diaphragm Valves

VACUUM & PRESSURE CONTROL UNIT

     • Atovac CG201 Convection Gauge

     • Atovac CG2000 Convection Gauge Controller

     • Atovac ACM200, 10 Torr Capacitance Manometer

     • Atovac ATV1000 Motor-Geared Throttle Valve

     • GPC3000 Pressure & Flow Controller

     • WSAutoma W2V40 Rotary Pump (400 liter/min)

SYSTEM CONTROL UNIT

     • MS Windows XP Pro Embedded PC

Fully Automated PC Control with LabVIEW Front End

          o Intel 3.0Ghz Core2Duo, 2GB Memory

     • PLC Module with National Inst. LabVIEW Interface

     • Samsung E1920R 19” LCD Monitor

SAFETY & COOLING

     • Water Cooled End Flanges

     • Buzzer Alarm & System Error Display

     • Interlock System

DIMENSIONS & UTILITY REQUIREMENTS

     • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D)

     • Weight:  ~200kg

     • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A

     • Air: 4-5kgf/cm2, ¼” tube

     • Water: 2-3kgf/cm2, ½” tube

planarGROW-2S With Turbo pump