QUARTZ TUBE & FURNACE #1 (GRAPHENE)

•    Quartz Tube Dimensions: ф50(OD)*1100(L)mm

•    Water Jacket Vacuum Plugs with Viton O-rings

•    Heating Element: Kanthal Wire, Glass Wool Insulation

•    K-type Thermocouple; 6.5mm Thermocouple Port

•    Heating Zone: 1-zone; 50x150mm; Max. Temp: 1,100°C

•    Furnace Dimensions: 300x350x300mm

QUARTZ TUBE & FURNACE #2 (MOS2)

•    Quartz Tube Dimensions: ф50(OD)*1100(L)mm

•    Water Jacket Vacuum Plugs with Viton O-rings

•    Heating Element: Kanthal Wire, Glass Wool Insulation

•    K-type Thermocouple; 6.5mm Thermocouple Port

•    Heating Zone: 1-zone; 50x150mm; Max. Temp: 1,100°C

•    Furnace Dimensions: 300x350x300mm

planarGROW-2S/2S with a dual furnace

•    Heating Jacket: 50x100mm; Max. Temp: 600°C

•    Auto Sliding Furnace

GAS SUPPLY UNIT

•    Four (4) AtoVac Mass Flow Controllers

o Argon (Ar): 1,000sccm

o Argon (Ar): 200sccm

o Hydrogen (H2): 100sccm

o Methane (CH4): 200sccm

•    Open Mounting Bays for fifth (5th) and Sixth (6th) MFCs

•    Five (5) ¼” Pneumatic-Type Diaphragm Valves

VACUUM PUMP & PRESSURE CONTROL UNIT

•    Atovac CG201-N Convection Gauge

•    Atovac CG2000 Convection Gauge Controller

•    Atovac ACM200 10 Torr Capacitance Manometer

Fully Automated PC Control with LabVIEW Front End

•    Atovac ACM200 1000 Torr Capacitance Manometer

•    Atovac ATV1000 Motor-geared Throttle Valve

•    Atovac GPC3000 Pressure & Flow Controller

•    Iwata or Equivlanet Dry Pump (250 liter/min) w/ Cold Trap

SYSTEM CONTROL UNIT

•    Fully automated PC Control via autoCON-2D Software

•    MS Windows 7 Embedded PC

o Intel 3.0Ghz Core2Duo, 2GB Memory

•    Samsung E1920R 19” LCD Monitor

DIMENSIONS & UTILITY REQUIREMENTS

     • Footprint: 1.80m (L) x 1.60m (H) x 1.20m (W)

     • Weight:  ~200kg

     • Power: 220V, 50/60Hz, 3Φ, 4-wire, 32A

     • Air: 4-5kgf/cm2, ¼” tube

     • Water: 2-3kgf/cm2, ½” tube

planarGROW-2S/2S (side-by-side dual tube system for TMD growth)