QUARTZ TUBE & FURNACE

•    Quartz Tube Dimensions: ф50(OD)*1000 mm

•    Water Jacket Vacuum Plugs with Viton O-rings

•    Heating Element: Kanthal Wire, Glass Wool Molding

•    Maximum Temp: 1,000°C, K-type Thermocouple

•    Heating Zone: 2-zones, ф50*300mm Each

•    Alumina Tray + Wafer Tray for 10x10mm2 Samples

GAS SUPPLY UNIT

•    One (1) Celerity TN2900 Mass Flow Controller

     o Argon (Ar): 1,000sccm

•    Open Mounting Bay for Second (2nd) MFC    

planarGROW-2B-MoS2 with Touch Screen

•    ¼” Stainless Steel Tubing

•    Two (2) ¼” Pneumatic-Type Diaphragm Valves

VACUUM & PRESSURE CONTROL UNIT

•    Atovac CG201 Convection Gauge

•    Atovac CG2000 Vacuum Gauge & Controller

•    GPC3000 Pressure & Flow Controller

•    Alcatel Dry Pump (400 liter/m) w/ Cold Trap

SYSTEM CONTROL UNIT

•    MS Windows XP Pro Embedded PC

     o Intel 3.0Ghz Core2Duo, 2GB Memory

•    PLC Module with National Inst. LabVIEW Interface

•    Samsung E1920R 19” LCD Monitor

Fully Automated PC Control with LabVIEW Front End

SAFETY & COOLING

•    Water Cooled End Flanges

•    Buzzer Alarm & System Error Display

•    Interlock System

DIMENSIONS & UTILITY REQUIREMENTS

•    Footprint: 1.5m (W) x 1.50m (H) x 0.80m (D)

•    Weight:  ~200kg

•    Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A

•    Air: 4-5kgf/cm2, ¼” tube

•    Water: 2-3kgf/cm2, ½” tube

planarGROW-2S/2S (side-by-side dual tube system for TMD growth)