用於合成h-BN的planarGROW高溫CVD系統是一水平式爐管加熱反應器。planarTECH 提供標準2" 系統(planarGROW-2S-BN)，亦可依客戶的具體應用要求進行客製。h-BN可以從液體環硼氮烷(liquid borazine)或固體氨(solid ammonia borane)，該系統同時支援此兩種前驅體，此外，該系統還可同時支援石墨烯的製程使用。
planarGROW-2S-BN CVD系統規格
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QUARTZ TUBE & FURNACE • Tube Dimensions: ф50*1000mm • Furnace Body (WxHxD): 500x500x650L • Heater: Kanthal Wire w/ Glass Wool Molding • Maximum Temperature: 1,100°C • Thermocouple: K type, ID 6.5 mm • Heating Zone: 1-zone, ф100*350mm • Linear Motion Control Unit • Manual Furnace Door GAS SUPPLY UNIT • Four (4) Celerity TN2900 Mass Flow Controllers o Hydrogen (H2), 100sccm |
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o Methane (CH4), 200sccm [For Graphene] o Argon (Ar): 1,000sccm o Nitrogen (N2): 1,000sccm Open Mounting Bay for Fifth (5th) MFC • ¼” 316L Stainless Steel Tubing/Fittings • Five (5) ¼” Pneumatic-Type Diaphragm Valves • Source Vapor Feeding System w/ Heating Jacket • Low Temp. Chiller (-10°C) for Borazine Canister VACUUM & PRESSURE CONTROL UNIT • Varian Dry Pump (110 liter/min) • KF25 2-step Pneumatic Roughing Valve • ¼” Manual Vent Valve • ¼” Metering Bypass Valve |
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SYSTEM CONTROL UNIT • MS Windows XP Pro Embedded PC o Intel 3.0Ghz Core2Duo, 2GB Memory • PLC Module with National Inst. LabVIEW Interface • Samsung E1920R 19” LCD Monitor SAFETY & COOLING • Water Cooled End Flanges w/ Viewport • SU304 50mm ID Vacuum Plugs • Aluminum Seal Bushes w/ Kalrez O-Rings • Cold Trap With Liquid Nitrogen Basket • Buzzer Alarm & System Error Display • Interlock System DIMENSIONS & UTILITY REQUIREMENTS • Footprint: 1.75m (W) x 1.60m (H) x 0.75m (D) • Weight: ~200kg • Power: 220V, 50/60Hz, 3Φ, 4-wire, 30A • Air: 4-5kgf/cm2, ¼” tube • Water: 2-3kgf/cm2, ½” tube |
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